The semiconductor quartz pedestals are engineered support structures designed to hold wafer boats or carriers securely during high-temperature semiconductor processes. Crafted from ultra-high purity fused quartz, these bases deliver outstanding thermal stability, corrosion resistance, and dimensional precision under rigorous manufacturing conditions.

Specifically tailored for 300 mm wafer applications, these bases ensure stable and accurate placement within diffusion, oxidation, LPCVD, and annealing furnace systems. Their refined surfaces and robust structure minimize particle contamination and thermal deformation, helping maintain a clean and consistent process environment.

Role of Semiconductor Quartz Pedestals in Wafer Support

Semiconductor quartz pedestals play a critical role in wafer fabrication by providing stable, high-temperature support for silicon wafers during processes such as diffusion, oxidation, CVD deposition, and annealing. Made from high-purity fused quartz, these pedestals resist thermal shock, corrosion, and chemical contamination, ensuring that wafers maintain their structural integrity and alignment throughout processing.

By supporting wafers evenly, quartz pedestals help maintain consistent spacing, optimize gas flow, and promote uniform thermal distribution. This directly contributes to higher process yield, improved wafer quality, and reduced defect rates. Compatible with both vertical and horizontal furnace systems, semiconductor quartz pedestals are essential components in achieving repeatable, high-precision manufacturing outcomes in modern semiconductor fabs.