Name:
6-inch Quartz Baffle
Function & Application:
It distributes heat more evenly by reflecting and diffusing thermal energy, effectively protecting wafers from direct radiation and localized overheating inside the high-temperature processing furnace. It is used in diffusion, oxidation, and CVD deposition processes in wafer manufacturing, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, excellent thermal stability, sandblasted surface treatment, and low impurity content.
No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
+86-572-3032373
+86-572-3033016
Thermal?Shield Quartz Baffles are precision-engineered components designed to improve heat distribution and protect silicon wafers from direct radiation and localized overheating during high-temperature semiconductor processes such as diffusion, oxidation, and CVD deposition. By reflecting and diffusing thermal energy inside the furnace, these baffles ensure a more uniform temperature profile, reducing thermal stress and enhancing wafer quality.
Manufactured from high-purity fused quartz, the baffles feature a sandblasted surface treatment that minimizes particle generation and improves thermal performance. With excellent resistance to high temperatures and chemical corrosion, as well as low impurity levels, Thermal?Shield Quartz Baffles provide durable, contamination-free operation in demanding cleanroom environments, contributing to improved process yields and device reliability.