The Quartz Wafer Support Pedestal is a high-purity fused quartz component designed to securely support quartz boats during high-temperature semiconductor wafer manufacturing processes such as diffusion, oxidation, CVD deposition, and annealing. Engineered to withstand extreme thermal conditions, this pedestal ensures excellent thermal stability and corrosion resistance, essential for maintaining process reliability and wafer integrity.

Its precision sandblasted surface promotes uniform gas flow distribution, enabling consistent exposure of process gases to silicon wafers housed within the quartz boat. The pedestal’s low impurity content reduces contamination risks, while its robust structure endures repeated thermal cycling, making it an indispensable part of advanced semiconductor fabrication equipment.

High-Temperature Stability of Quartz Wafer Support Pedestals

Why Stability Matters

• Maintains Precision – Prevents distortion at temperatures exceeding 1000 °C.
• Resists Thermal Shock – Endures rapid heating and cooling cycles without cracking.
• Ensures Purity – High-purity quartz minimizes contamination risks.
• Supports Yield – Stable wafer positioning reduces warpage and defect formation.

Benefits for Semiconductor Processing

1. Enhanced wafer uniformity

2. Longer component lifetime

3. Lower maintenance and replacement costs

Engineers and fabs rely on high-purity, thermally stable quartz wafer support pedestals to achieve consistent results and protect valuable wafers during critical thermal processes.